ASML’s planned Low-NA EUV machine price hikes reportedly frustrate TSMC — lithography machine maker comes knocking to make bank on TSMC’s profitable fabs, potentially costing the Taiwanese chipmaker billions

ASML says that the increased productivity of its Low-NA EUV tools gives it an option to increase the prices of these scanners in the future. The move may have a drastic effect on TSMC's future expansion plans, as the foundry made a big bet on existing lithography systems.